NEOVAC is well-known as a synonym for high quality vacuum pump oil. We have received endorsements of NEOVAC as the oil used by many vacuum pump manufacturers due to the high level of trust placed in NEOVAC's performance. NEOVAC is used in vacuum equipment in applications such as semiconductors, silicon wafers, vacuum deposition, heat treatment, and packaging and contributes to productivity improvements.

NEOVAC MR Series

Rotary pump vacuum oil is used with the purposes of lubrication and the preservation of airtight seals. It has a low steam pressure, suitable viscosity, and is difficult to emulsify (it has anti-emulsification properties). In other words, it easily separates from water and removes water.

MR-100 : Standard for small pump
MR-200 : Standard for small pump
MR-250 : Standard for small pump
MR-200A : Improved heat and oxidation. Moisture suction is supported
MR-250A : Improved heat and oxidation. Moisture suction is supported. For large pump

NEOVAC SX & SY

Diffusion pump vacuum oil is sprayed either as molecules or as a steam and is used to obtain a vacuum state. It is necessary for these oils to be chemically stable such as by having low steam pressures, by not being transformed due to heat (heat resistance), and by not reacting easily with oxygen (oxidation resistance).

SX : For surface treatment equipment. (vapor deposition, sputter, heat treatment)
SY : For surface treatment equipment. (vapor deposition, sputter, heat treatment)